Our sputtering targets deliver an optimal balance between coating performance and total cost of ownership. Their unique combination of design and material features ensures safe operation and a stable sputtering process, even at elevated power levels.
Our manufacturing capabilities allow the production of large-size rotatable targets, up to 3.9 meters in length and up to 225 mm in diameter.
Our high-quality rotatable (cylindrical) targets feature a joint-free design, including “dog-bone” profiles, and a strong indium-free bond to the backing tube. These characteristics enable high-power sputtering and allow material utilization down to the last millimeter, resulting in improved material efficiency and a lower cost of ownership compared to traditional straight cylindrical targets.
Our proprietary technologies also enable the reuse of backing tubes with minimal material waste, providing highly cost-effective solutions, particularly through our ECO-Recycling technology, applicable to molybdenum targets.
In addition to our standard and customizable thickness profiles, available in metallic, ceramic, and cermet formulations, our research and development capabilities allow us to work closely with customers to develop on-demand sputtering target formulations tailored to specific application requirements.
High-Purity Molybdenum Rotatable Target
(3N7+ pure)
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- Very high purity formulation that meets the standards of the most demanding applications : FPD, PV-Thin-film , Touch screens, …. Allows to produce thin films with very low resistivity that are ideal for thin electrode layers, bus-bar layers, metal gates, TFT interconnects.
- Available with “dog-bone” shape for optimum material usage and lower cost of ownership
- Proprietary technology enables high-power sputtering for higher deposition rates up to 50 kW/m
Specification
| Purity | >99.97 |
| Target Thickness | up to 18mm |
| Thickness Profile | straight or dog bone (without joints) |
| Maximum Lengths | up to 3.9 meters(12¾ feet) |
| Impurities | Fe < 30 ppm Ni < 10ppm |
| Electrical Resistivity | Measured on Target Material: Measured on Thin Films: |
| Surface Finish | Rmax < 10 μm and Ra < 0.8 µm |
| Recycling | yes with Eco-Recycling process |
Alumina-Doped Zinc Oxide Rotatable Target
High Performance Alumina-Doped Zinc Oxide AZO
Features & Benefits
- Saint-Gobain AZO (Alumina-doped Zinc Oxide) sputtering targets are produced using a proprietary manufacturing process that ensures excellent thermal conductivity through strong bonding with the backing tube. Combined with a moderate target thickness, this enables very efficient cooling during sputtering, significantly reducing micro-arcing and nodule formation.
- The target surface is fully continuous (no joints) and the material is fully homogeneous along the entire target length, unlike segmented sintered targets. This design provides superior process stability and highly reliable operation for the deposition of transparent and conductive oxide (TCO) layers.
AZO targets are optimized for:
- Stable and repeatable sputtering processes
- Very low arcing and micro-arcing levels
- Non-reactive (oxygen-free) sputtering, preventing oxygen cross-contamination in multilayer stacks
- High material utilization and optimized operating cost
Typical applications
- Transparent conductive front and back contacts in thin-film photovoltaic cells
- Seed and buffer layers in Ag-based Low-E and solar control glass stacks
- TCO layers for display and touch sensor structures
Specification
| Thickness profile | Straight or Dog‑bone (no joints) |
| Target material thickness | Up to 7 mm |
| Maximum target length | 3 900 mm |
| Composition | ZnO doped with 2wt % Al₂O₃ (lower contents available on demand) |
| Purity | 3N5 (≥ 99.95 %) |
| Density | 5,15 ±0,15 g.cm³ |
| Electrical resistivity (measured on target) | 1.10⁻³ Ω.cm (measured on target material) |
| Maximum sputtering power | 35 kW m⁻¹ (DC, chamber cooling dependent) |
| Recommended power ramp-up | 0,5 kW m⁻¹.min⁻¹ |
| Deposition rate (at 20 kW m⁻¹ DC) | 130 nm.m.min⁻¹ (indicative only) |
Tungsten High-Purity Rotatable Targets
(3N5+ pure)
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- Very high purity formulation that meets the standards of the most demanding applications like for Electrochomic cell stacks our targets enabling high quality WO3 or HWO3 thin films
- Available with “dog-bone” shape for optimum material usage and lower cost of ownership
- Continuous surface and strong bond ensuring stable operation with reduced risk of micro-arcs
Specification
| Purity | < 99.95% |
| Target Thickness | up to 15 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maxilum Length | up to 3.9 meters (12¾ feet) |
| Oxygen Content | < 200 ppm |
| Surface Finish | Polished (Ra < 3.2 µm) or Raw Surface |
Silicon High-Purity Rotatable Targets
(3N5+ pure)
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- High-purity Silicon targets are suitable for the magnetron sputtering deposition of either Pure Si thin film, Oxide SiO2 thin film, Nitride Si3N4 thin film for the most demanding applications and such as Touch Screen Display Glass (Touch sensor / Color filter), Web Coating (Si-based barrier layers on polymer films), or Flat Glass
- applications in display (FPD, touch screens) industry, in PV-thin film, ….
- Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use.
Specification
| Purity | > 99.95% |
| Target Thickness | up to 9 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12¾ feet) |
| Target Density | 2.20 g/cm3 |
| Oxygen Content | < 500 ppm |
| Electrical Resistivity | < 0.05 Ω.cm |
| Surface Finish | Ra < 0.8 µm |
Silicon Aluminum Rotatable Targets
(3N5+ pure)
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- SiAl targets are extensively used in architectural glass, automotive glass, web coating (polymer films), and touch panel industries to produce either Si3N4 or SiO2 layers
- Saint-Gobain has mastered internal stresses to yield safe, high quality SiAl targets that don’t crack during use
- Suitable for both Ar+N2 mode (silicon nitride coatings) and Ar+O2 mode (SiO2 coatings)
Specification
| Composition | Si-Al (90/10 wt%) can be tuned to customer needs |
| Target Thickness (center) | up to 16 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12¾ feet) |
| Target Density | 2.20 – 2.30 g/cm3 |
| Oxygen Content | < 500 ppm |
| Nitrogen Content | < 100 ppm |
| Purity | (Si + Al) > 99.8% - Higher purity on-demand |
| Surface Finish | Ra < 1.2 μm |
TiOx Rotatable Targets
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- Our TiOx targets are suitable for achieving high optical index layers on architectural glass, automotive glass, solar glass, polymer films coatings (web coatings). & others and are enabling anti-reflection properties on these substrates.
- Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use
- Our targets have been optimized for extremely low dusting (particle release) during sputtering, cleaner operation.
- Compatible with high power sputtering up to 35 kW/m in DC and 40 kW/m in AC or pulsed DC
Specification
| TiOx version | TiOx (1.95) | TiOx (1.86) |
| Target Thickness (center) | up to 9 mm | up to 9 mm |
| Thickness Profile | straight or dog-bone (without joints) | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12¾ feet) | up to 3.9 meters (12¾ feet) |
| Target Density | 4.05 g/cm3 | 4.0 g/cm3 |
| Oxygen Content | x value ∽ 1.95 | x value ∽ 1.86 |
| Purity | > 99.7% | > 99.7% |
| Electrical resistivity | 2 Ω.cm | 0.15 Ω.cm |
| Surface Finish | Polished (Ra< 0.8 μm) or Raw surface | Polished (Ra< 0.8 μm) or Raw surface |
Nb2Ox Rotatable Targets
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- Our Nb2Ox targets are suitable for various applications including index matching layers in touchscreen-based displays (capacitive touchscreen), high optical index layers on architectural glass, automotive glass, solar glass, polymer films (web coatings), enabling anti-reflection properties on these substrates.
- Saint-Gobain has mastered internal stresses to yield safe, high-quality targets that don’t crack during use.
- Our targets have been optimized for extremely low dusting (particle release) during sputtering, enabling cleaner operation.
- Compatible with high-power sputtering up to 35 kW/m in DC and 40 kW/m in AC or pulsed DC.
Specification
| Target Thickness (center) | up to 9 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12¾ feet) |
| Target Density | 5.10 g/cm3 |
| Oxygen Content | x value ∽ 4.80 |
| Purity | > 99.8 % or 99.95% on-demand |
| Electrical resistivity | 0.02 Ω.cm |
| Surface Finish | Ra < 0.2 μm |
Nobium High-Purity Rotatable Targets
Sputtering Targets (35N pure)
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- Very high purity formulation that meets the standards of the most demanding applications such as touchscreens, electrochromic cell stacks, high optical index layers, and applications on flat glass or polymer film substrates.
- Available with “dog-bone” shape for optimum material usage and lower cost of ownership.
- Continuous surface and strong bond ensuring stable operation with reduced risk of micro-arcs.
Specification
| Purity | > 99.95 % |
| Target Thickness | up to 15 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12¾ feet) |
| Oxygen Content | < 400 ppm |
| Surface Finish | Polished (Ra < 3.2 µm) or Raw surface |
Tantalum High-Purity Rotatable Targets
Sputtering Targets (35N pure)
Technically Advanced Magnetron Sputtering Targets
Features & Benefits
- Very high purity formulation that enables the deposition of advanced dielectric layers (Ta2O5) and that meets the standards of the most demanding applications such as Optics, Optoelectronics, Integrated microtechnologies, and Electrochromic glazings.
- Available with “dog-bone” shape for optimum material usage and lower cost of ownership
- Continuous surface and strong bond ensuring stable operation with reduced risk of micro-arcs
Specification
| Purity | > 99.95% |
| Target Thickness | up to 12 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12¾ feet) |
| Oxygen Content | < 1200 ppm |
| Surface Finish | Polished (Ra < 3.2 µm) or Raw surface |
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