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        • ProPlasma Gun
        • ProPlasma Full System
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        • Master Jet Auto
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        • Spray Unit-Gun Extension for ID Spray
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      • Protection against molten zinc
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      • Reaction barrier coating for setter plates
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    1. Home
    2. Materials
    3. Technically Superior High-Quality Sputtering Targets

    Materials

    Materials Menu  

    EB-PVD Ingots - Yttria Zirconia

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    PVD Sputtering Targets

    RocDur Series

    • RocDur 29
    • RocDur 37
    • RocDur 40
    • RocDur 44
    • RocDur 62
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    • RocDur 6740
    • RocDur 6750
    • RocDur Co6
    • RocDur Co12

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    • Chromium Oxide
    • Zirconium Oxide
    • Bond Coat

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    • Yttria
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    • Grade A
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    • Grade M

    Technically Superior High-Quality Sputtering Targets

    Magnetron In Operation | Saint-Gobain Coating SolutionsSaint-Gobain Coating Solutions applies its vast knowledge of materials technology to produce a range of high-quality rotatable sputtering targets for architectural glass, automotive glass, smart windows, PV-thin film, Flat Panel Display, web coating, coatings on polymer films. 

    The unique combination of features of our sputtering targets provides safe operation and a stable process at nominal deposition rate for a given material. Our targets deliver the best combination of high-quality coatings with optimized cost of ownership. 

    • Our proprietary technology allows us to produce high-quality rotatable targets up to 3.9 meters, with no-joints even with the “dog-bone” profile, and without the need for an indium-bonding layer.
    • These features alEnd view of Moly target | Saint-Gobain Coating Solutionslow high-power sputtering and enable the user to sputter down to the last millimeter of material – meaning better usage and cost savings over traditionally shaped bonded or monolithic targets.
    • Our proprietary technology also allows us to re-use backing tubes with minimal material waste for highly cost-effective solutions, in particular with our ECO-Recycling technology applicable on Molybdenum targets.

    Saint-Gobain offers a range of standard & customizable thickness profiles, in metallic, ceramic & cermet formulations. In addition, Saint-Gobain has the research & development capabilities to work with customers to develop on-demand target formulations.

    • Mo
    • Mo-Alloys
    • W
    • Nb
    • Ta
    • Si
    • SiAl
    • TiOx

    High-Purity Molybdenum Rotatable Targets

    (3N7+ pure)

    Technically Advanced Sputtering Targets

    Features & Benefits

    • Very high purity formulation that meets the standards of the most demanding applications: FPD, PV-Thin-film electrodes, touch screens. Allows to produce thin films with very low resistivity that are ideal for highly conductive Molybdenum thin films applications.
    • Available with  “dog-bone” shape to maximize material usage
    • Proprietary technology enables high-power sputtering for higher deposition rates up to 30 kW/m
    Cross-sectional view of the moly target | Saint-Gobain Coating Solutions

    SPECIFICATIONS

    Target Thickness (Center) up to 18 mm
    Thickness Profile straight or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density >9.35 g/cm3 (>92%)
    Purity > 99.97%

    Impurities
    Fe < 30 ppm
    Ni < 10 ppm
    Electrical resistivity (measured on target material) 7.5 μΩ.cm
    Electrical resistivity (measured on thin films) 19 μΩ.cm for 90 nm (thin film example 1)
    14 μΩ.cm for 120 nm (thin film example 2)
    12 μΩ.cm  for 200 nm (thin film example 3)
    Surface Finish  Rmax <10 μm
    Recycling yes with Eco-Recycling process

     

    Technically Advanced Sputtering Targets

    All compositions of this family meet High Purity Standards suitable for FPD, PV-Thin-Film, Smart Windows devices.

    Saint-Gobain Coating Solutions unique manufacturing process enables us to manufacture a wide range of Mo-X combinations without the limitations usually encountered with usual manufacturing processes (sintering, hot forming).

    We can combine with practically no limitations a wide range of elements with Molybdenum, enabling you to follow your imagination and explore new possibilities.

    Available compositions: Mo-X, with X = W, Nb, Ti, Ta, Al, Cu, Si, and others can be considered upon request.

    Sputtering Targets | Saint-Gobain Coating Solutions

     

     

    Tungsten High-Purity Rotatable Targets

    (3N5 pure)

    SPECIFICATIONS

    Target Thickness (center) up to 15 mm
    Thickness Profile straight or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density > 16.5 g/cm3 (88%)
    Oxygen Content < 100 ppm
    Purity > 99.95%
    Surface Finish Rmax < 12 μm
    Recycling yes (Backing Tube)

     

    Niobium High-Purity Rotatable Targets

    (3N5 pure)

    SPECIFICATIONS

    Target Thickness (center) up to 15 mm
    Thickness Profile straight or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density 7.5 g/cm3 (92%)
    Oxygen Content < 400 ppm
    Nitrogen Content < 100 ppm
    Purity > 99.95%
    Surface Finish Rmax < 12 μm
    Recycling yes (Backing Tube)
    Niobium High-Purity Rotatable Sputtering Targets | Saint-Gobain Coating Solutions

     

    Tantalum High-Purity Rotatable Targets

    Technically Advanced Sputtering Targets

    (3N5 pure)

    SPECIFICATIONS

    Target Thickness (center) up to 12 mm
    Thickness Profile straight  or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density 14 g/cm3 (88%)
    Oxygen Content < 1200 ppm
    Nitrogen Content < 50 ppm
    Purity > 99.95%
    Surface Finish Rmax < 12 μm
    Recycling yes (Backing Tube)

     

    Silicon High-Purity Rotatable Targets

    (3N+ pure)

    Technically Advanced Sputtering Targets

    • High-purity Silicon targets are suitable for applications in display (FPD, touch screens) industry, in PV-thin film. 
    • Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use.
    Silicon High-Purity Rotatable Targets | Saint-Gobain Coating Solutions

    SPECIFICATIONS

    Target Thickness (center) up to 10 mm
    Thickness Profile straight or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density 2.25 g/cm3  (95%)
    Oxygen Content < 500 ppm
    Nitrogen Content < 100 ppm
    Purity > 99.95 % (higher purity available on-demand)
    Surface Finish  Rmax < 12 μm
    Recyling  yes (Backing Tube)

     

    Silicon-Aluminum Rotatable Targets

    Technically Advanced Targets

    • SiAl targets are extensively used in architectural glass, web coating, PV-thin film and touch panel industries to produce either Si3N4 or SiO2 layers
    • Saint-Gobain has mastered internal stresses to yield safe, high quality SiAl targets that don’t crack during use
    • Suitable for both Ar+N2 mode (silicon nitride coatings) and Ar+O2 mode (SiO2 coatings)
    Silicon-Aluminum Rotatable Targets | Saint-Gobain Coating Solutions

    SPECIFICATIONS

    Composition SiAl (90/10 wt% or customizable)
    Target Thickness (center) up to 16 mm
    Thickness Profile straight or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density 2.20 – 2.30 g/cm3 (2 -5% porosity)
    Oxygen Content < 500 ppm
    Nitrogen Content < 100 ppm
    Purity > 99.8 % 
    Aluminum Content upon request
    Surface Finish Rmax < 12 μm
    Recycling yes (Backing Tube)

     

     

    TiOx Rotatable Targets

    Technically Advanced Targets

    • TiOx targets are suitable for architectural glass, polymer film coatings, web coatings & others
    • Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use
    TiOx Rotatable Targets | Saint-Gobain Coating Solutions

    SPECIFICATIONS

    Target Thickness (center) up to 9 mm
    Thickness Profile straight or dog-bone (without joints)
    Maximum Length up to 3.9 meters (12.75 feet)
    Target Density 4.1 +/- 0.1 g/cm3
    Oxygen Content x value 1.95 as standard
    x value 1.86 upon request
    Purity > 99.7 % 
    Thermal Conductivity 2.5 W.m-1.K-1for x = 1.95
    1.7 W.m-1.K-1 for x = 1.86
    Electrical resistivity 1.9 Ω.cm for x = 1.95
    0.15 Ω.cm for x = 1.86
    Surface Finish Rmax < 12 μm
    Recycling Yes (Backing Tube)

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