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Technically Superior High-Quality Sputtering Targets
Saint-Gobain Coating Solutions applies its vast knowledge of materials technology to produce a range of high-quality rotatable sputtering targets for architectural glass, automotive glass, smart windows, PV-thin film, Flat Panel Display, web coating, coatings on polymer films.
The unique combination of features of our sputtering targets provides safe operation and a stable process at nominal deposition rate for a given material. Our targets deliver the best combination of high-quality coatings with optimized cost of ownership.
- Our proprietary technology allows us to produce high-quality rotatable targets up to 3.9 meters, with no-joints even with the “dog-bone” profile, and without the need for an indium-bonding layer.
- These features allow high-power sputtering and enable the user to sputter down to the last millimeter of material – meaning better usage and cost savings over traditionally shaped bonded or monolithic targets.
- Our proprietary technology also allows us to re-use backing tubes with minimal material waste for highly cost-effective solutions, in particular with our ECO-Recycling technology applicable on Molybdenum targets.
Saint-Gobain offers a range of standard & customizable thickness profiles, in metallic, ceramic & cermet formulations. In addition, Saint-Gobain has the research & development capabilities to work with customers to develop on-demand target formulations.
High-Purity Molybdenum Rotatable Targets
(3N7+ pure)
Technically Advanced Sputtering Targets
Features & Benefits
- Very high purity formulation that meets the standards of the most demanding applications: FPD, PV-Thin-film electrodes, touch screens. Allows to produce thin films with very low resistivity that are ideal for highly conductive Molybdenum thin films applications.
- Available with “dog-bone” shape to maximize material usage
- Proprietary technology enables high-power sputtering for higher deposition rates up to 30 kW/m
SPECIFICATIONS
| Target Thickness (Center) | up to 18 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | >9.35 g/cm3 (>92%) |
| Purity | > 99.97% |
Impurities |
Fe < 30 ppm |
| Ni < 10 ppm | |
| Electrical resistivity (measured on target material) | 7.5 μΩ.cm |
| Electrical resistivity (measured on thin films) | 19 μΩ.cm for 90 nm (thin film example 1) 14 μΩ.cm for 120 nm (thin film example 2) 12 μΩ.cm for 200 nm (thin film example 3) |
| Surface Finish | Rmax <10 μm |
| Recycling | yes with Eco-Recycling process |
Technically Advanced Sputtering Targets
All compositions of this family meet High Purity Standards suitable for FPD, PV-Thin-Film, Smart Windows devices.
Saint-Gobain Coating Solutions unique manufacturing process enables us to manufacture a wide range of Mo-X combinations without the limitations usually encountered with usual manufacturing processes (sintering, hot forming).
We can combine with practically no limitations a wide range of elements with Molybdenum, enabling you to follow your imagination and explore new possibilities.
Available compositions: Mo-X, with X = W, Nb, Ti, Ta, Al, Cu, Si, and others can be considered upon request.
Tungsten High-Purity Rotatable Targets
(3N5 pure)
SPECIFICATIONS
| Target Thickness (center) | up to 15 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | > 16.5 g/cm3 (88%) |
| Oxygen Content | < 100 ppm |
| Purity | > 99.95% |
| Surface Finish | Rmax < 12 μm |
| Recycling | yes (Backing Tube) |
Niobium High-Purity Rotatable Targets
(3N5 pure)
SPECIFICATIONS
| Target Thickness (center) | up to 15 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | 7.5 g/cm3 (92%) |
| Oxygen Content | < 400 ppm |
| Nitrogen Content | < 100 ppm |
| Purity | > 99.95% |
| Surface Finish | Rmax < 12 μm |
| Recycling | yes (Backing Tube) |
Tantalum High-Purity Rotatable Targets
Technically Advanced Sputtering Targets
(3N5 pure)
SPECIFICATIONS
| Target Thickness (center) | up to 12 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | 14 g/cm3 (88%) |
| Oxygen Content | < 1200 ppm |
| Nitrogen Content | < 50 ppm |
| Purity | > 99.95% |
| Surface Finish | Rmax < 12 μm |
| Recycling | yes (Backing Tube) |
Silicon High-Purity Rotatable Targets
(3N+ pure)
Technically Advanced Sputtering Targets
- High-purity Silicon targets are suitable for applications in display (FPD, touch screens) industry, in PV-thin film.
- Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use.
SPECIFICATIONS
| Target Thickness (center) | up to 10 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | 2.25 g/cm3 (95%) |
| Oxygen Content | < 500 ppm |
| Nitrogen Content | < 100 ppm |
| Purity | > 99.95 % (higher purity available on-demand) |
| Surface Finish | Rmax < 12 μm |
| Recyling | yes (Backing Tube) |
Silicon-Aluminum Rotatable Targets
Technically Advanced Targets
- SiAl targets are extensively used in architectural glass, web coating, PV-thin film and touch panel industries to produce either Si3N4 or SiO2 layers
- Saint-Gobain has mastered internal stresses to yield safe, high quality SiAl targets that don’t crack during use
- Suitable for both Ar+N2 mode (silicon nitride coatings) and Ar+O2 mode (SiO2 coatings)
SPECIFICATIONS
| Composition | SiAl (90/10 wt% or customizable) |
| Target Thickness (center) | up to 16 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | 2.20 – 2.30 g/cm3 (2 -5% porosity) |
| Oxygen Content | < 500 ppm |
| Nitrogen Content | < 100 ppm |
| Purity | > 99.8 % |
| Aluminum Content | upon request |
| Surface Finish | Rmax < 12 μm |
| Recycling | yes (Backing Tube) |
TiOx Rotatable Targets
Technically Advanced Targets
- TiOx targets are suitable for architectural glass, polymer film coatings, web coatings & others
- Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use
SPECIFICATIONS
| Target Thickness (center) | up to 9 mm |
| Thickness Profile | straight or dog-bone (without joints) |
| Maximum Length | up to 3.9 meters (12.75 feet) |
| Target Density | 4.1 +/- 0.1 g/cm3 |
| Oxygen Content | x value 1.95 as standard x value 1.86 upon request |
| Purity | > 99.7 % |
| Thermal Conductivity | 2.5 W.m-1.K-1for x = 1.95 1.7 W.m-1.K-1 for x = 1.86 |
| Electrical resistivity | 1.9 Ω.cm for x = 1.95 0.15 Ω.cm for x = 1.86 |
| Surface Finish | Rmax < 12 μm |
| Recycling | Yes (Backing Tube) |