Saint-Gobain Coating Solutions applies its vast knowledge of materials technology to produce a range of high-quality rotatable sputtering targets for architectural glass, automotive glass, smart windows, PV-thin film, Flat Panel Display, web coating, coatings on polymer films.
The unique combination of features of our sputtering targets provides safe operation and a stable process at nominal deposition rate for a given material. Our targets deliver the best combination of high-quality coatings with optimized cost of ownership.
Saint-Gobain offers a range of standard & customizable thickness profiles, in metallic, ceramic & cermet formulations. In addition, Saint-Gobain has the research & development capabilities to work with customers to develop on-demand target formulations.
Target Thickness (Center) | up to 18 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | >9.35 g/cm3 (>92%) |
Purity | > 99.97% |
Impurities |
Fe < 30 ppm |
Ni < 10 ppm | |
Electrical resistivity (measured on target material) | 7.5 μΩ.cm |
Electrical resistivity (measured on thin films) | 19 μΩ.cm for 90 nm (thin film example 1) 14 μΩ.cm for 120 nm (thin film example 2) 12 μΩ.cm for 200 nm (thin film example 3) |
Surface Finish | Rmax <10 μm |
Recycling | yes with Eco-Recycling process |
All compositions of this family meet High Purity Standards suitable for FPD, PV-Thin-Film, Smart Windows devices.
Saint-Gobain Coating Solutions unique manufacturing process enables us to manufacture a wide range of Mo-X combinations without the limitations usually encountered with usual manufacturing processes (sintering, hot forming).
We can combine with practically no limitations a wide range of elements with Molybdenum, enabling you to follow your imagination and explore new possibilities.
Available compositions: Mo-X, with X = W, Nb, Ti, Ta, Al, Cu, Si, and others can be considered upon request.
Target Thickness (center) | up to 15 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | > 16.5 g/cm3 (88%) |
Oxygen Content | < 100 ppm |
Purity | > 99.95% |
Surface Finish | Rmax < 12 μm |
Recycling | yes (Backing Tube) |
Target Thickness (center) | up to 15 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | 7.5 g/cm3 (92%) |
Oxygen Content | < 400 ppm |
Nitrogen Content | < 100 ppm |
Purity | > 99.95% |
Surface Finish | Rmax < 12 μm |
Recycling | yes (Backing Tube) |
Target Thickness (center) | up to 12 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | 14 g/cm3 (88%) |
Oxygen Content | < 1200 ppm |
Nitrogen Content | < 50 ppm |
Purity | > 99.95% |
Surface Finish | Rmax < 12 μm |
Recycling | yes (Backing Tube) |
Target Thickness (center) | up to 10 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | 2.25 g/cm3 (95%) |
Oxygen Content | < 500 ppm |
Nitrogen Content | < 100 ppm |
Purity | > 99.95 % (higher purity available on-demand) |
Surface Finish | Rmax < 12 μm |
Recyling | yes (Backing Tube) |
Composition | SiAl (90/10 wt% or customizable) |
Target Thickness (center) | up to 16 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | 2.20 – 2.30 g/cm3 (2 -5% porosity) |
Oxygen Content | < 500 ppm |
Nitrogen Content | < 100 ppm |
Purity | > 99.8 % |
Aluminum Content | upon request |
Surface Finish | Rmax < 12 μm |
Recycling | yes (Backing Tube) |
Target Thickness (center) | up to 9 mm |
Thickness Profile | straight or dog-bone (without joints) |
Maximum Length | up to 3.9 meters (12.75 feet) |
Target Density | 4.1 +/- 0.1 g/cm3 |
Oxygen Content | x value 1.95 as standard x value 1.86 upon request |
Purity | > 99.7 % |
Thermal Conductivity | 2.5 W.m-1.K-1for x = 1.95 1.7 W.m-1.K-1 for x = 1.86 |
Electrical resistivity | 1.9 Ω.cm for x = 1.95 0.15 Ω.cm for x = 1.86 |
Surface Finish | Rmax < 12 μm |
Recycling | Yes (Backing Tube) |