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  3. Technically Superior High-Quality Sputtering Targets

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PVD Sputtering Targets

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Technically Superior High-Quality Sputtering Targets

Magnetron In Operation | Saint-Gobain Coating SolutionsSaint-Gobain Coating Solutions applies its vast knowledge of materials technology to produce a range of high-quality rotatable sputtering targets for architectural glass, automotive glass, smart windows, PV-thin film, Flat Panel Display, web coating, coatings on polymer films. 

The unique combination of features of our sputtering targets provides safe operation and a stable process at nominal deposition rate for a given material. Our targets deliver the best combination of high-quality coatings with optimized cost of ownership. 

  • Our proprietary technology allows us to produce high-quality rotatable targets up to 3.9 meters, with no-joints even with the “dog-bone” profile, and without the need for an indium-bonding layer.
  • These features alEnd view of Moly target | Saint-Gobain Coating Solutionslow high-power sputtering and enable the user to sputter down to the last millimeter of material – meaning better usage and cost savings over traditionally shaped bonded or monolithic targets.
  • Our proprietary technology also allows us to re-use backing tubes with minimal material waste for highly cost-effective solutions, in particular with our ECO-Recycling technology applicable on Molybdenum targets.

Saint-Gobain offers a range of standard & customizable thickness profiles, in metallic, ceramic & cermet formulations. In addition, Saint-Gobain has the research & development capabilities to work with customers to develop on-demand target formulations.

  • Mo
  • Mo-Alloys
  • W
  • Nb
  • Ta
  • Si
  • SiAl
  • TiOx

High-Purity Molybdenum Rotatable Targets

(3N7+ pure)

Technically Advanced Sputtering Targets

Features & Benefits

  • Very high purity formulation that meets the standards of the most demanding applications: FPD, PV-Thin-film electrodes, touch screens. Allows to produce thin films with very low resistivity that are ideal for highly conductive Molybdenum thin films applications.
  • Available with  “dog-bone” shape to maximize material usage
  • Proprietary technology enables high-power sputtering for higher deposition rates up to 30 kW/m
Cross-sectional view of the moly target | Saint-Gobain Coating Solutions

SPECIFICATIONS

Target Thickness (Center) up to 18 mm
Thickness Profile straight or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density >9.35 g/cm3 (>92%)
Purity > 99.97%

Impurities
Fe < 30 ppm
Ni < 10 ppm
Electrical resistivity (measured on target material) 7.5 μΩ.cm
Electrical resistivity (measured on thin films) 19 μΩ.cm for 90 nm (thin film example 1)
14 μΩ.cm for 120 nm (thin film example 2)
12 μΩ.cm  for 200 nm (thin film example 3)
Surface Finish  Rmax <10 μm
Recycling yes with Eco-Recycling process

 

Technically Advanced Sputtering Targets

All compositions of this family meet High Purity Standards suitable for FPD, PV-Thin-Film, Smart Windows devices.

Saint-Gobain Coating Solutions unique manufacturing process enables us to manufacture a wide range of Mo-X combinations without the limitations usually encountered with usual manufacturing processes (sintering, hot forming).

We can combine with practically no limitations a wide range of elements with Molybdenum, enabling you to follow your imagination and explore new possibilities.

Available compositions: Mo-X, with X = W, Nb, Ti, Ta, Al, Cu, Si, and others can be considered upon request.

Sputtering Targets | Saint-Gobain Coating Solutions

 

 

Tungsten High-Purity Rotatable Targets

(3N5 pure)

SPECIFICATIONS

Target Thickness (center) up to 15 mm
Thickness Profile straight or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density > 16.5 g/cm3 (88%)
Oxygen Content < 100 ppm
Purity > 99.95%
Surface Finish Rmax < 12 μm
Recycling yes (Backing Tube)

 

Niobium High-Purity Rotatable Targets

(3N5 pure)

SPECIFICATIONS

Target Thickness (center) up to 15 mm
Thickness Profile straight or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density 7.5 g/cm3 (92%)
Oxygen Content < 400 ppm
Nitrogen Content < 100 ppm
Purity > 99.95%
Surface Finish Rmax < 12 μm
Recycling yes (Backing Tube)
Niobium High-Purity Rotatable Sputtering Targets | Saint-Gobain Coating Solutions

 

Tantalum High-Purity Rotatable Targets

Technically Advanced Sputtering Targets

(3N5 pure)

SPECIFICATIONS

Target Thickness (center) up to 12 mm
Thickness Profile straight  or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density 14 g/cm3 (88%)
Oxygen Content < 1200 ppm
Nitrogen Content < 50 ppm
Purity > 99.95%
Surface Finish Rmax < 12 μm
Recycling yes (Backing Tube)

 

Silicon High-Purity Rotatable Targets

(3N+ pure)

Technically Advanced Sputtering Targets

  • High-purity Silicon targets are suitable for applications in display (FPD, touch screens) industry, in PV-thin film. 
  • Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use.
Silicon High-Purity Rotatable Targets | Saint-Gobain Coating Solutions

SPECIFICATIONS

Target Thickness (center) up to 10 mm
Thickness Profile straight or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density 2.25 g/cm3  (95%)
Oxygen Content < 500 ppm
Nitrogen Content < 100 ppm
Purity > 99.95 % (higher purity available on-demand)
Surface Finish  Rmax < 12 μm
Recyling  yes (Backing Tube)

 

Silicon-Aluminum Rotatable Targets

Technically Advanced Targets

  • SiAl targets are extensively used in architectural glass, web coating, PV-thin film and touch panel industries to produce either Si3N4 or SiO2 layers
  • Saint-Gobain has mastered internal stresses to yield safe, high quality SiAl targets that don’t crack during use
  • Suitable for both Ar+N2 mode (silicon nitride coatings) and Ar+O2 mode (SiO2 coatings)
Silicon-Aluminum Rotatable Targets | Saint-Gobain Coating Solutions

SPECIFICATIONS

Composition SiAl (90/10 wt% or customizable)
Target Thickness (center) up to 16 mm
Thickness Profile straight or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density 2.20 – 2.30 g/cm3 (2 -5% porosity)
Oxygen Content < 500 ppm
Nitrogen Content < 100 ppm
Purity > 99.8 % 
Aluminum Content upon request
Surface Finish Rmax < 12 μm
Recycling yes (Backing Tube)

 

 

TiOx Rotatable Targets

Technically Advanced Targets

  • TiOx targets are suitable for architectural glass, polymer film coatings, web coatings & others
  • Saint-Gobain has mastered internal stresses to yield safe, high quality targets that don’t crack during use
TiOx Rotatable Targets | Saint-Gobain Coating Solutions

SPECIFICATIONS

Target Thickness (center) up to 9 mm
Thickness Profile straight or dog-bone (without joints)
Maximum Length up to 3.9 meters (12.75 feet)
Target Density 4.1 +/- 0.1 g/cm3
Oxygen Content x value 1.95 as standard
x value 1.86 upon request
Purity > 99.7 % 
Thermal Conductivity 2.5 W.m-1.K-1for x = 1.95
1.7 W.m-1.K-1 for x = 1.86
Electrical resistivity 1.9 Ω.cm for x = 1.95
0.15 Ω.cm for x = 1.86
Surface Finish Rmax < 12 μm
Recycling Yes (Backing Tube)

 Contact us to learn more!

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